Key Features
The KOFLOC Model 3660 is a compact, low-cost, high-performance mass flow controller that balances speed and stability. It features a thermal mass flow sensor and a proportional solenoid valve, supporting flow rates from 10 SCCM to 100 SLM (N2 equivalent) with an accuracy of ±1 to 1.5% F.S. It is commonly used in semiconductor fabrication, industrial furnace atmospheres, gas mixing, and pilot plant automation.
